Screen Printing of SU-8 Layers for Microstructure Fabrication / Ar Sietspiedi Uzklātu SU-8 Pārklājumi Mikro-Struktūru Izgatavošanai

Ultrathick SU-8 fabrication for microreciprocating engines

Nianjun Sun Beijing Aeronautical Manufacturing Technology Research Institute P.O. Box 863 Beijing 100024 China Abstract. We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power ...

Fabrication of multi-layer SU-8 microstructures

The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...

Fabrication of Su-8 Microstructures for Analytical Microfluidic Applications

Microstructuring of Su-8

Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structu...

Straight SU-8 pins

SU-8 can be patterned with high resolution, is flexible and tough. These characteristics qualify SU-8 as a material for making spotting pins for printing DNA and protein microarrays, and it can potentially replace the commonly used silicon and steel pins that are expensive, brittle in the case of silicon and can damage the substrate during the printing process. SU-8, however, accumulates large ...